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ISO 14644-13-2026【PDF原文+中文翻译版】洁净室及相关受控环境 第 13 部分:为达到规定的颗粒物与化学物浓度洁净度等级而开展的表面清洁

ISO 14644-13-2026【PDF原文+中文翻译版】洁净室及相关受控环境 第 13 部分:为达到规定的颗粒物与化学物浓度洁净度等级而开展的表面清洁

ISO 14644-13-2026【PDF原文+中文翻译版】

Cleanrooms and associated controlled environments – Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration

洁净室及相关受控环境 第 13 部分:为达到规定的颗粒物与化学物浓度洁净度等级而开展的表面清洁

standard by International Organization for Standardization, 03/01/2026.

LANGUAGES: English+Chinese【英文原文+中文翻译】

Historical Editions: ISO 14644-13:2017, ISO 14644-13:2017

Description

This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels.

The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10.

The document gives general guidance on the following:

expected surface cleanliness levels;

suitability of cleaning methods;

compatibility of surfaces with the cleaning technique;

assessment of cleaning appropriateness.

The following are excluded from this document:

classification of cleaning methods;

product produced within a cleanroom;

specific surface-related cleaning methods;

detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;

detailed material characteristics;

description of damage mechanisms by cleaning processes and time-dependent effects;

references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;

other characteristics of particles such as electrostatic charge, ionic charges, etc.;

chemical reactions between molecular contaminants and surfaces;

microbiological aspects of surface cleanliness;

radioactive aspects of contamination;

health and safety considerations;

environmental aspects such as waste disposal, emissions, etc.;

selection and use of statistical methods.

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